Hele Savin

Peer-reviewed scientific articles

Journal article-refereed, Original research

Ozone-Based Atomic Layer Deposition of Al₂O₃ from Dimethylaluminum Chloride and Its Impact on Silicon Surface Passivation

Bao, Yameng; Laitinen, Mikko; Sajavaara, Timo; Savin, Hele

2017 in Advanced Electronic Materials (Wiley)

ISSN: 2199-160X

Surface Passivation Properties of HfO₂ Thin Film on n-Type Crystalline Si

Cheng, Xuemei; Repo, Paivikki; Haug, Halvard; Perros, Alexander Pyymaki; Marstein, Erik Stensrud; Di Sabatino, Marisa; Savin, Hele

2017 in IEEE JOURNAL OF PHOTOVOLTAICS (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC)

ISSN: 2156-3381

Predictable quantum efficient detector based on n-type silicon photodiodes

Dönsberg, Timo; Manoocheri, Farshid; Sildoja, Meelis; Juntunen, Mikko; Savin, Hele; Tuovinen, Esa; Ronkainen, Hannu; Prunnila, Mika; Merimaa, Mikko; Tang, Chi Kwong; Gran, Jarle; Mueller, Ingmar; Werner, Lutz; Rougie, Bernard; Pons, Alicia; Smid, Marek; Gal, Peter; Lolli, Lapo; Brida, Giorgio; Rastello, Maria Luisa; Ikonen, Erkki

2017 in METROLOGIA (IOP PUBLISHING LTD)

ISSN: 0026-1394

Data of ALD Al₂O₃ rear surface passivation, Al₂O₃ PERC cell performance, and cell efficiency loss mechanisms of Al₂O₃ PERC cell

Huang, Haibing; Lv, Jun; Bao, Yameng; Xuan, Rongwei; Sun, Shenghua; Sneck, Sami; Li, Shuo; Modanese, Chiara; Savin, Hele; Wang, Aihua; Zhao, Jianhua

2017 in Data in Brief (Elsevier BV)

ISSN: 2352-3409

20.8% industrial PERC solar cell ALD Al₂O₃ rear surface passivation, efficiency loss mechanisms analysis and roadmap to 24%

Huang, Haibing; Lv, Jun; Bao, Yameng; Xuan, Rongwei; Sun, Shenghua; Sneck, Sami; Li, Shuo; Modanese, Chiara; Savin, Hele; Wang, Aihua; Zhao, Jianhua

2017 in Solar Energy Materials and Solar Cells (Elsevier Science B.V.)

ISSN: 0927-0248

Data of the recombination loss mechanisms analysis on Al₂O₃ PERC cell using PC1D and PC2D simulations

Huang, Haibing; Lv, Jun; Bao, Yameng; Xuan, Rongwei; Sun, Shenghua; Sneck, Sami; Li, Shuo; Modanese, Chiara; Savin, Hele; Wang, Aihua; Zhao, Jianhua

2017 in Data in Brief (Elsevier BV)

ISSN: 2352-3409

Characterization of light-activated Cu defects in silicon: Comparison with the recombination activity of metallic precipitates

Inglese, Alessandro; Vahlman, Henri; Kwapil, Wolfram; Schön, Jonas; Savin, Hele

2017 in PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS (Wiley-VCH Verlag)

ISSN: 1862-6351

Silicon dioxide mask by plasma enhanced atomic layer deposition in focused ion beam lithography

Liu, Zhengjun; Shah, Ali; Alasaarela, Tapani; Chekurov, Nikolai; Savin, Hele; Tittonen, Ilkka

2017 in NANOTECHNOLOGY (IOP PUBLISHING LTD)

ISSN: 0957-4484

Electronic Quality Improvement of Highly Defective Quasi-Mono Silicon Material by Phosphorus Diffusion Gettering

Liu, Zhengjun; Vähänissi, Ville; Laine, Hannu S.; Lindeberg, Morten; Yli-Koski, Marko; Savin, Hele

2017 in Advanced Electronic Materials (Wiley)

ISSN: 2199-160X

Increased Throughput and Sensitivity of Synchrotron-Based Characterization for Photovoltaic Materials

Morishige, Ashley E.; Laine, Hannu S.; Looney, Erin E.; Jensen, Mallory A.; Vogt, Stefan; Li, Joel B.; Lai, Barry; Savin, Hele; Buonassisi, Tonio

2017 in IEEE JOURNAL OF PHOTOVOLTAICS (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC)

ISSN: 2156-3381

Light-induced degradation in quasi-monocrystalline silicon PERC solar cells Indications on involvement of copper

Vahlman, Henri; Wagner, Matthias; Wolny, Franziska; Krause, Andreas; Laine, Hannu; Inglese, Alessandro; Yli-Koski, Marko; Savin, Hele

2017 in PHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE (WILEY-V C H VERLAG GMBH)

ISSN: 1862-6300

Modeling of light-induced degradation due to Cu precipitation in p-type silicon. I. General theory of precipitation under carrier injection

Vahlman, H.; Haarahiltunen, A.; Kwapil, W.; Schön, J.; Inglese, A.; Savin, H.

2017 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

Modeling of light-induced degradation due to Cu precipitation in p-type silicon. II. Comparison of simulations and experiments

Vahlman, H.; Haarahiltunen, A.; Kwapil, W.; Schön, J.; Inglese, A.; Savin, H.

2017 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

Recombination processes in passivated boron-implanted black silicon emitters

Von Gastrow, Guillaume; Ortega, Pablo; Alcubilla, Ramon; Husein, Sebastian; Nietzold, Tara; Bertoni, Mariana; Savin, Hele

2017 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

Full recovery of red zone in p-type high-performance multicrystalline silicon

Vähänissi, Ville; Laine, Hannu S.; Liu, Zhengjun; Yli-Koski, Marko; Haarahiltunen, Antti; Savin, Hele

2017 in Solar Energy Materials and Solar Cells (Elsevier Science B.V.)

ISSN: 0927-0248

Wave optical simulation of the light trapping properties of black silicon surface textures

Bett, Alexander Jürgen; Eisenlohr, Johannes; Höhn, Oliver; Repo, Päivikki; Savin, Hele; Bläsi, Benedikt; Goldschmidt, Jan Christoph

2016 in Optics Express (OPTICAL SOC AMER)

ISSN: 1094-4087

Recombination activity of light-activated copper defects in p-type silicon studied by injection- and temperature-dependent lifetime spectroscopy

Inglese, Alessandro; Lindroos, Jeanette; Vahlman, Henri; Savin, Hele

2016 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

Near-unity quantum efficiency of broadband black silicon photodiodes with an induced junction

Juntunen, Mikko A.; Heinonen, Juha; Vähänissi, Ville; Repo, Päivikki; Valluru, Dileep; Savin, Hele

2016 in NATURE PHOTONICS (Nature Publishing Group)

ISSN: 1749-4885

Impact of Iron Precipitation on Phosphorus-Implanted Silicon Solar Cells

Laine, Hannu S.; Vähänissi, Ville; Morishige, Ashley E.; Hofstetter, Jasmin; Haarahiltunen, Antti; Lai, Barry; Savin, Hele; Fenning, David P.

2016 in IEEE JOURNAL OF PHOTOVOLTAICS (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC)

ISSN: 2156-3381

Effect of substrate pretreatments on the atomic layer deposited Al2O3 passivation quality

Bao, Yameng; Li, Shuo; von Gastrow, Guillaume; Repo, Päivikki; Putkonen, Matti; Savin, Hele

2015 in JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (AVS Science and Technology Society)

ISSN: 0734-2101

Enhancement of the performance of as-grown mc-Si wafers from the deteriorated area of ingots by internal gettering

Boulfrad, Yacine; Haarahiltunen, Antti; Savin, Hele

2015 in PROGRESS IN PHOTOVOLTAICS (JOHN WILEY & SONS LTD)

ISSN: 1062-7995

Accelerated light-induced degradation for detecting copper contamination in p-type silicon

Inglese, Alessandro; Lindroos, Jeanette; Savin, Hele

2015 in APPLIED PHYSICS LETTERS (AMER INST PHYSICS)

ISSN: 0003-6951

Excellent silicon surface passivation using dimethylaluminium chloride as Al source for atomic layer deposited Al2O3

Li, S.; Bao, Yameng; Laitinen, M.; Sajavaara, T.; Putkonen, M.; Savin, Hele

2015 in PHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE (WILEY-V C H VERLAG GMBH)

ISSN: 1862-6300

Building intuition of iron evolution during solar cell processing through analysis of different process models

Morishige, A.E.; Laine, H.S.; Schön, J.; Haarahiltunen, Antti; Hofstetter, J.; del Cañizo, C.; Schubert, M.; Savin, Hele; Buonassisi, T.

2015 in APPLIED PHYSICS A-MATERIALS SCIENCE AND PROCESSING (Springer Heidelberg)

ISSN: 0947-8396

High-efficiency black silicon interdigitated back contacted solar cells on p-type and n-type c-Si substrates

Ortega, Pablo; Calle, Eric; von Gastrow, Guillaume; Repo, Päivikki; Carrió, David; Savin, Hele; Alcubilla, Ramón

2015 in PROGRESS IN PHOTOVOLTAICS (JOHN WILEY & SONS LTD)

ISSN: 1062-7995

Black silicon solar cells with interdigitated back-contacts achieve 22.1% efficiency

Savin, Hele; Repo, Paivikki; von Gastrow, Guillaume; Ortega, Pablo; Calle, Eric; Garin, Moises; Alcubilla, Ramon

2015 in NATURE NANOTECHNOLOGY (Nature Publishing Group)

ISSN: 1748-3387

Analysis of the Atomic Layer Deposited Al2O3 field-effect passivation in black silicon

von Gastrow, Guillaume; Alcubilla, Ramon; Ortega, Pablo; Yli-Koski, Marko; Conesa-Boj, Sònia; Fontcuberta i Morral, Anna; Savin, Hele

2015 in Solar Energy Materials and Solar Cells (Elsevier Science B.V.)

ISSN: 0927-0248

Effect of ozone concentration on silicon surface passivation by atomic layer deposited Al2O3

von Gastrow, Guillaume; Li, Shuo; Putkonen, Matti; Laitinen, Mikko; Sajavaara, Timo; Savin, Hele

2015 in APPLIED SURFACE SCIENCE (Elsevier Science B.V.)

ISSN: 0169-4332

Experimental evidence on removing copper and light-induced degradation from silicon by negative charge

Boulfrad, Yacine; Lindroos, Jeanette; Wagner, Matthias; Wolny, Franziska; Yli-Koski, Marko; Savin, Hele

2014 in APPLIED PHYSICS LETTERS (AMER INST PHYSICS)

ISSN: 0003-6951

Excellent passivation and low reflectivity with atomic layer deposited bilayer coatings for n-type silicon solar cells

Lee, Benjamin G.; Li, Shuo; von Gastrow, Guillaume; Yli-Koski, Marko; Savin, Hele; Malinen, Ville; Skarp, Jarmo; Choi, Sugkeun; Branz, Howard M.

2014 in THIN SOLID FILMS (Elsevier Science)

ISSN: 0040-6090

Formation kinetics of copper-related light-induced degradation in crystalline silicon

Lindroos, Jeanette; Savin, Hele

2014 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

Preventing light-induced degradation in multicrystalline silicon

Lindroos, Jeanette; Boulfrad, Yacine; Yli-Koski, Marko; Savin, Hele

2014 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

Spin disorder scattering in a ferromagnetic insulator-on-graphene structure

Savin, Hele; Kuivalainen, Pekka; Lebedeva, Natalia; Novikov, S.

2014 in PHYSICA STATUS SOLIDI B: BASIC SOLID STATE PHYSICS (Akademie Verlag GMBH)

ISSN: 0370-1972

Magnetic polaron formation in graphene- based single- electron transistor

Savin, Hele; Kuivalainen, Pekka; Novikov, S.; Lebedeva, Natalia

2014 in PHYSICA STATUS SOLIDI B: BASIC SOLID STATE PHYSICS (Akademie Verlag GMBH)

ISSN: 0370-1972

Main defect reactions behind phosphorus diffusion gettering of iron

Schön, Jonas; Vähänissi, Ville; Haarahiltunen, Antti; Schubert, Martin; Warta, Wilhelm; Savin, Hele

2014 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

Gettering of Iron in Silicon Solar Cells with Implanted Emitters

Vähänissi, Ville; Haarahiltunen, Antti; Yli-Koski, Marko; Savin, Hele

2014 in IEEE JOURNAL OF PHOTOVOLTAICS (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC)

ISSN: 2156-3381

Enhanced performance in the deteriorated area of multicrystalline silicon wafers by internal gettering

Boulfrad, Yacine; Haarahiltunen, Antti; Savin, Hele; Ovrelid, Eivind J.; Arnberg, Lars

2013 in PROGRESS IN PHOTOVOLTAICS (JOHN WILEY & SONS LTD)

ISSN: 1062-7995

Reduction of Light induced Degradation of Boron-doped Solar-grade Czochralski Silicon by Corona Charging

Boulfrad, Yacine; Lindroos, Jeanette; Inglese, Alessandro; Yli-Koski, Marko; Savin, Hele

2013 in Energy Procedia (Elsevier BV)

A quantum statistical model for graphene FETs on SiC

Kuivalainen, Pekka; Savin, Hele; Lebedeva, Natalia; Novikov, S.

2013 in PHYSICA STATUS SOLIDI B: BASIC SOLID STATE PHYSICS (Akademie Verlag GMBH)

ISSN: 0370-1972

Light-induced degradation in copper-contaminated gallium-doped silicon

Lindroos, Jeanette; Yli-Koski, Marko; Haarahiltunen, Antti; Schubert, Martin C.; Savin, Hele

2013 in PHYSICA STATUS SOLIDI: RAPID RESEARCH LETTERS (Wiley-VCH Verlag)

ISSN: 1862-6254

Nickel: A very fast diffuser in silicon

Lindroos, Jeanette; Fenning, David P.; Backlund, Daniel J.; Verlage, Erik; Gorgulla, Angelika; Estreicher, Stefan K.; Savin, Hele; Buonassisi, Tonio

2013 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

N-type black silicon solar cells

Repo, Päivikki; Benick, Jan; Vähänissi, Ville; Schön, Jonas; von Gastrow, Guillaume; Steinhauser, Bernd; Schubert, Martin C.; Hermle, Martin; Savin, Hele

2013 in Energy Procedia (Elsevier BV)

Effective passivation of black silicon surfaces by atomic layer deposition

Repo, Päivikki; Haarahiltunen, Antti; Sainiemi, Lauri; Yli-Koski, Marko; Talvitie, Heli; Schubert, Martin; Savin, Hele

2013 in IEEE JOURNAL OF PHOTOVOLTAICS (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC)

ISSN: 2156-3381

Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide

Repo, Päivikki; Benick, Jan; von Gastrow, Guillaume; Vähänissi, Ville; Heinz, Friedemann D.; Schön, Jonas; Schubert, Martin C.; Savin, Hele

2013 in PHYSICA STATUS SOLIDI: RAPID RESEARCH LETTERS (Wiley-VCH Verlag)

ISSN: 1862-6254

Nanomanufacturing of black silicon for photovoltaic applications

Savin, Hele

2013 in INTERNATIONAL JOURNAL OF NANOMANUFACTURING (Inderscience Enterprises Ltd)

ISSN: 1746-9392

Analysis of the Evolution of Iron Precipitates in Multicrystalline Silicon During Solar Cell Processing

Schön, Jonas; Haarahiltunen, Antti; Savin, Hele; Fenning, David; Buonassisi, Tonio; Warta, Wilhelm; Schubert, Martin

2013 in IEEE JOURNAL OF PHOTOVOLTAICS (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC)

ISSN: 2156-3381

Ozone-based batch atomic layer deposited Al2O3 for effective surface passivation

von Gastrow, Guillaume; Li, Shuo; Repo, Päivikki; Bao, Yameng; Putkonen, Matti; Savin, Hele

2013 in Energy Procedia (Elsevier BV)

Significant minority carrier lifetime improvement in red edge zone in n-type multicrystalline silicon

Vähänissi, Ville; Yli-Koski, Marko; Haarahiltunen, Antti; Talvitie, Heli; Bao, Yameng; Savin, Hele

2013 in Solar Energy Materials and Solar Cells (Elsevier Science B.V.)

ISSN: 0927-0248

Impact of phosphorus gettering parameters and initial iron level on silicon solar cell properties

Vähänissi, Ville; Haarahiltunen, Antti; Talvitie, Heli; Yli-Koski, Marko; Savin, Hele

2013 in PROGRESS IN PHOTOVOLTAICS (JOHN WILEY & SONS LTD)

ISSN: 1062-7995

Glass Polarization Induced Drift in Microelectromechanical Capacitor

Haarahiltunen, Antti; Varpula, Aapo; Leinvuo, Jouni; Siren, Esko; Rytkönen, Vesa-Pekka; Savin, Hele

2012 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

Room-temperature method for minimizing light-induced degradation in crystalline silicon

Lindroos, Jeanette; Yli-koski, Marko; Haarahiltunen, Antti; Savin, Hele

2012 in APPLIED PHYSICS LETTERS (AMERICAN INSTITUTE OF PHYSICS)

ISSN: 0003-6951

Iron segregation in silicon-on-insulator wafer with polysilicon interlayer

Yli-Koski, Marko; Haarahiltunen, Antti; Hintsala, Jouko; Savin, Hele

2012 in PHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE (WILEY-V C H VERLAG GMBH)

ISSN: 1862-6300

Modeling the effect of mobile ion contamination on the stability of a microelectromechanical resonator

Haarahiltunen, Antti; Varpula, Aapo; Savin, Hele

2011 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

Gettering of iron in CZ-silicon by polysilicon layer

Haarahiltunen, Antti; Yli-Koski, Marko; Talvitie, Heli; Vähänissi, Ville; Lindroos, Jeanette; Savin, Hele

2011 in PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS (Wiley-VCH Verlag)

ISSN: 1862-6351

Silicon Surface Passivation by Al2O3: Effect of ALD Reactants

Repo, Päivikki; Talvitie, Heli; Li, Shuo; Skarp, Jarmo; Savin, Hele

2011 in Energy Procedia (Elsevier BV)

Effect of thermal history on iron precipitation in crystalline silicon

Savin, Hele

2011 in Energy Procedia (Elsevier BV)

Phosphorus and boron diffusion gettering of iron in monocrystalline silicon

Talvitie, Heli; Vähänissi, Ville; Haarahiltunen, Antti; Yli-Koski, Marko; Savin, Hele

2011 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

Experimental study of iron redistribution between bulk defects and boron doped layer in silicon wafers

Talvitie, Heli; Yli-Koski, Marko; Haarahiltunen, Antti; Vähänissi, Ville; Asghar, Muhammad Imran; Savin, Hele

2011 in PHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE (WILEY-V C H VERLAG GMBH)

ISSN: 1862-6300

Analysis of Heterogeneous Iron Precipitation in Multicrystalline Silicon

Haarahiltunen, Antti; Vähänissi, Ville; Yli-Koski, Marko; Talvitie, Heli; Savin, Hele

2010 in SOLID STATE PHENOMENA (Scientific.net)

ISSN: 1012-0394

Analysis of simultaneous boron and phosphorus diffusion gettering in silicon

Schön, J.; Schubert, M.C.; Warta, W.; Savin, Hele; Haarahiltunen, Antti

2010 in PHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE (WILEY-V C H VERLAG GMBH)

ISSN: 1862-6300

Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon

Vähänissi, Ville; Haarahiltunen, Antti; Yli-Koski, Marki; Talvitie, H.; Asghar, M. I.; Savin, Hele

2010 in SOLID STATE PHENOMENA (Scientific.net)

ISSN: 1012-0394

Physical mechanisms of boron diffusion gettering of iron in silicon

Vähänissi, V.; Haarahiltunen, A.; Talvitie, H.; Yli-Koski, M.; Lindroos, J.; Savin, H.

2010 in PHYSICA STATUS SOLIDI: RAPID RESEARCH LETTERS (Wiley-VCH Verlag)

ISSN: 1862-6254

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I.; Yli-Koski, M.; Savin, H.; Haarahiltunen, A.; Talvitie, H.; Sinkkonen, J.

2009 in MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS (Elsevier BV)

Micro-photoluminescence spectroscopy on metal precipitates in silicon

Gundel, Paul; Schubert, Martin C.; Kwapil, Wolfram; Schoen, Jonas; Reiche, Manfred; Savin, Hele; Yli-Koski, Marko; Sans, Juan Angel; Martinez-Criado, Gema; Seifert, Winfried; Warta, Wilhelm; Weber, Eicke R.

2009 in PHYSICA STATUS SOLIDI: RAPID RESEARCH LETTERS (Wiley-VCH Verlag)

ISSN: 1862-6254

Modeling phosphorus diffusion gettering of iron in single crystal silicon

Haarahiltunen, Antti; Savin, Hele; Yli-Koski, Marko; Talvitie, Heli; Sinkkonen, Juha

2009 in JOURNAL OF APPLIED PHYSICS (AIP Publishing)

ISSN: 0021-8979

As-grown iron precipitates and gettering in multicrystalline silicon

Haarahiltunen, Antti; Savin, Hele; Yli-Koski, Marko; Talvitie, Heli; Asghar, M. I.; Sinkkonen, Juha

2009 in MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS (Elsevier BV)

Gettering in silicon-on-insulator wafers with polysilicon layer

Savin, Hele; Yli-Koski, Marko; Haarahiltunen, Antti; Virkkala, Ville; Talvitie, Heli; Asghar, M. I.; Sinkkonen, Juha

2009 in MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS (Elsevier BV)

ISSN: 0921-5107

Role of copper in light induced minority-carrier lifetime degradation of silicon

Savin, H.; Yli-Koski, M.; Haarahiltunen, A.

2009 in APPLIED PHYSICS LETTERS (AMER INST PHYSICS)

ISSN: 0003-6951

Effect of internal gettering of iron on electrical characteristics of devices

Talvitie, Heli; Haarahiltunen, Antti; Savin, Hele; Yli-Koski, Marko; Asghar, M. I.; Sinkkonen, Juha

2009 in MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS (Elsevier BV)

ISSN: 0921-5107

Gettering of iron in silicon by boron implantation

Haarahiltunen, Antti; Talvitie, Heli; Savin, Hele; Anttila, O.; Yli-Koski, Marko; Asghar, M. I.; Sinkkonen, Juha

2008 in JOURNAL OF MATERIALS SCIENCE: MATERIALS IN ELECTRONICS (Springer New York)

ISSN: 0957-4522

Modeling boron diffusion gettering of iron in silicon solar cells

Savin, Hele; Talvitie, Heli; Yli-Koski, Marko; Haarahiltunen, Antti; Asghar, M. I.; Sinkkonen, Juha

2008 in APPLIED PHYSICS LETTERS (AMERICAN INSTITUTE OF PHYSICS)

ISSN: 0003-6951

Effect of transition metals on oxygen precipitation in silicon

Talvitie, Heli; Haarahiltunen, Antti; Yli-Koski, Marko; Savin, Hele; Sinkkonen, Juha

2008 in Journal of Physics: Conference Series (IOP Publishing Ltd.)

Detection of Nickel in Silicon by Recombination Lifetime Measurements

Savin, Hele; Yli-Koski, Marko; Haarahiltunen, Antti; Talvitie, Heli; Sinkkonen, Juha

2007 in ECS TRANSACTIONS (Electrochemical Society, Inc.)

ISSN: 1938-5862

Contactless Diagnostic Tools and Metallic Contamination in the Semiconductor Industry

Savin, Hele; Yli-Koski, Marko; Haarahiltunen, Antti; Talvitie, Heli; Sinkkonen, Juha

2007 in ECS TRANSACTIONS (Electrochemical Society, Inc.)

ISSN: 1938-5862

Measurement of copper in p-type silicon using charge-carrier lifetime methods

Yli-Koski, Marko; Savin, Hele; Saarnilehto, Eero; Haarahiltunen, Antti; Sinkkonen, Juha; Berenyi, G.; Pavelka, Tibor

2005 in SOLID STATE PHENOMENA (Scientific.net)

ISSN: 1012-0394

Review article, Literature review, Systematic review

Review Article Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"

Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Bechelany, Mikhael; Berdova, Maria; Boyadjiev, Stefan; Cameron, David C.; Chen, Rong; Chubarov, Mikhail; Cremers, Veronique; Devi, Anjana; Drozd, Viktor; Elnikova, Liliya; Gottardi, Gloria; Grigoras, Kestutis; Hausmann, Dennis M.; Hwang, Cheol Seong; Jen, Shih Hui; Kallio, Tanja; Kanervo, Jaana; Khmelnitskiy, Ivan; Kim, Do Han; Klibanov, Lev; Koshtyal, Yury; Krause, A. Outi I.; Kuhs, Jakob; Kärkkänen, Irina; Kääriäinen, Marja Leena; Kääriäinen, Tommi; Lamagna, Luca; Łapicki, Adam A.; Leskelä, Markku; Lipsanen, Harri; Lyytinen, Jussi; Malkov, Anatoly; Malygin, Anatoly; Mennad, Abdelkader; Militzer, Christian; Molarius, Jyrki; Norek, Małgorzata; Özgit-Akgün, Çaǧla; Panov, Mikhail; Pedersen, Henrik; Piallat, Fabien; Popov, Georgi; Puurunen, Riikka L.; Rampelberg, Geert; Ras, Robin H A; Rauwel, Erwan; Roozeboom, Fred; Sajavaara, Timo; Salami, Hossein; Savin, Hele; Schneider, Nathanaelle; Seidel, Thomas E.; Sundqvist, Jonas; Suyatin, Dmitry B.; Törndahl, Tobias; Van Ommen, J. Ruud; Wiemer, Claudia; Ylivaara, Oili M E; Yurkevich, Oksana

2017 in JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A (AVS Science and Technology Society)

ISSN: 0734-2101

Review of light-induced degradation in crystalline silicon solar cells

Lindroos, Jeanette; Savin, Hele

2016 in Solar Energy Materials and Solar Cells (Elsevier Science B.V.)

ISSN: 0927-0248

Book section, Chapters in research books

Oxygen and bulk microdefects in silicon

Savin, Hele; Airaksinen, Veli-Matti

2010

ISBN: 978-0-8155-1594-4

Conference proceedings

Efficient surface passivation of black silicon using spatial atomic layer deposition

Heikkinen, Ismo; Repo, Päivikki; Vähänissi, Ville; Pasanen, Toni; Malinen, Ville; Savin, Hele

2017 in Energy Procedia (Elsevier)

ISSN: 1876-6102

Black silicon n-Type photodiodes with high response over wide spectral range

Heinonen, Juha; Juntunen, Mikko A.; Laine, Hannu S.; Vähänissi, Ville; Repo, Päivikki; Dönsberg, Timo; Savin, Hele

2017 in Proceedings of SPIE : the International Society for Optical Engineering (SPIE)

ISBN: 9781510609631

ISSN: 0277-786X

N-Type induced junction black silicon photodiode for UV detection

Juntunen, Mikko A.; Heinonen, Juha; Laine, Hannu S.; Vähänissi, Ville; Repo, Päivikki; Vaskuri, Anna; Savin, Hele

2017 in Proceedings of SPIE (SPIE)

ISBN: 9781510609990

ISSN: 0277-786X

Surface passivation of black silicon phosphorus emitters with atomic layer deposited SiO2/Al2O3 stacks

Pasanen, Toni; Vähänissi, Ville; Theut, Nicholas; Savin, Hele

2017 in Energy Procedia (Elsevier)

ISSN: 1876-6102

Effect of low-temperature annealing on defect causing copper-related light-induced degradation in p-type silicon

Vahlman, Henri; Haarahiltunen, Antti; Kwapil, Wolfram; Schön, Jonas; Yli-Koski, Marko; Inglese, Alessandro; Modanese, Chiara; Savin, Hele

2017 in Energy Procedia (Elsevier)

ISSN: 1876-6102

Silicon Surface Passivation by Mixed Aluminum Precursors in Al2O3 Atomic Layer Deposition

Bao, Yameng; Huang, Haibing; Zhu, Zhen; Lv, Jun; Savin, Hele

2016 in ENERGY PROCEDIA (Elsevier)

ISSN: 1876-6102

Mixed Aluminum Precursor in the Atomic Layer Deposited Al2O3 for Effective Silicon Emitter Passivation

Bao, Yameng; Huang, Haibing; Lv, Jun; Savin, Hele

2016 in IEEE Photovoltaic Specialists Conference (IEEE)

ISBN: 978-1-5090-2724-8

ISSN: 0160-8371

Long-term stability of Al2O3 passivated black silicon

Calle, Eric; Ortega, Pablo; von Gastrow, Guillaume; Martin, Isidro; Savin, Hele; Alcubilla, Ramon

2016 in ENERGY PROCEDIA (Elsevier)

ISSN: 1876-6102

Light-induced degradation in multicrystalline silicon the role of copper

Inglese, Alessandro; Focareta, Alessia; Schindler, Florian; Schön, Jonas; Lindroos, Jeanette; Schubert, Martin C.; Savin, Hele

2016 in ENERGY PROCEDIA (Elsevier)

ISSN: 1876-6102

Finite- vs. infinite-source emitters in silicon photovoltaics Effect on transition metal gettering

Laine, Hannu S.; Vähänissi, Ville; Liu, Zhengjun; Huang, Haibing; Magana, Ernesto; Morishige, Ashley E.; Khelifati, Nabil; Husein, Sebastian; Lai, Barry; Bertoni, Mariana; Bouhafs, Djoudi; Buonassisi, Tonio; Fenning, David P.; Savin, Hele

2016 in Conference record of the IEEE Photovoltaic Specialists Conference (Institute of Electrical and Electronics Engineers Inc.)

ISBN: 9781509027248

ISSN: 0160-8371

Accelerating synchrotron-based characterization of solar materials Development of flyscan capability

Morishige, Ashley E.; Laine, Hannu S.; Jensen, Mallory A.; Yen, Patricia X T; Looney, Erin E.; Vogt, Stefan; Lai, Barry; Savin, Hele; Buonassisi, Tonio

2016 in Conference record of the IEEE Photovoltaic Specialists Conference (Institute of Electrical and Electronics Engineers Inc.)

ISBN: 9781509027248

ISSN: 0160-8371

Silicon surface passivation with atomic layer deposited aluminum nitride

Repo, Päivikki; Bao, Yameng; Seppänen, Heli; Sippola, Perttu; Savin, Hele

2016 in Conference record of the IEEE Photovoltaic Specialists Conference (IEEE)

ISBN: 978-1-5090-2724-8

ISSN: 0160-8371

Effect of different ALD Al2O3 oxidants on the surface passivation of black silicon

Repo, Päivikki; Savin, Hele

2016 in Energy procedia (Elsevier)

ISSN: 1876-6102

An extendible beyond 20% efficiency cost-efficient bifacial cell using boron & phosphorus implantation technology and its prospects for the future production

Huang, Haibing; Lv, Jun; Wang, Lichun; Wang, Jianbo; Zhu, Weicheng; Mandrell, Lisa; Sullivan, Jim; Adibi, Babak; Smith, Chris; Laine, Hannu; Savin, Hele

2015

ISBN: 9781479979448

Overview of early publications on Atomic Layer Deposition

Aarik, Jaan; Akbashev, Andrew R.; Cameron, David; Elam, Jeffrey; Elliott, Simon; Gottardi, Gloria; Grigoras, Kestutis; Koshtyal, Yury; Kääriäinen, Marja-Leena; Kääriäinen, Tommi; Malkov, Anatoly; Malygin, Anatoly; Molarius, Jyrki; Nikkola, Juha; Pedersen, Henrik; Puurunen, Riikka L.; Ras, Robin H. A.; Roozeboom, Fred; Savin, Hele; Seidel, Thomas E.; Sundqvist, Jonas; van Ommen, J.Ruud; Ylivaara, Oili M. E.

2014

On the Early History of ALD: Molecular Layering

Aarik, Jaan; Akbashev, Andrew R.; Cameron, David; Elam, Jeffrey; Elliott, Simon; Gottardi, Gloria; Grigoras, Kestutis; Koshtyal, Yury; Kääriäinen, Marja-Leena; Kääriäinen, Tommi; Malkov, Anatoly; Malygin, Anatoly; Molarius, Jyrki; Nikkola, Juha; Pedersen, Henrik; Puurunen, Riikka L.; Ras, Robin H. A.; Roozeboom, Fred; Savin, Hele; Seidel, Thomas E.; Sundqvist, Jonas; van Ommen, J.Ruud; Ylivaara, Oili

2014

Experimental evidence on removing copper from silicon by charge and its impact on LID

Boulfrad, Yacine; Savin, Hele

2014

Iron Precipitation upon Gettering in Phosphorus-Implanted Czochralski Silicon and its Impact on Solar Cell Performance

Fenning, David; Vähänissi, Ville; Morishige, Ashley; Laine, Hannu; Haarahiltunen, Antti; Castellanos, Sergio; Jensen, Mallory; Savin, Hele

2014

Impact of implantation damage on the solar cell performance

Liu, Z.; Savin, Hele

2014

The size distribution of iron precipitates in implanted solar cells

Savin, Hele

2014

Fast-diffusing interstitial nickel in silicon

Lindroos, Jeanette; Fenning, David P.; Backlund, Daniel J.; Verlage, Erik; Gorgulla, Angelika; Estreicher, Stefan K.; Savin, Hele; Buonassisi, Tonio

2013

Reducing light-induced degradation in multi-crystalline silicon

Lindroos, Jeanette; Boulfrad, Yacine; Yli-Koski, Marko; Savin, Hele

2013

Fast room-temperature removal of light induced degradation in Cz-silicon

Boulfrad, Yacine; Yli-Koski, Marko; Haarahiltunen, Antti; Savin, Hele

2012

Modeling of boron and phosphorus diffusion gettering of iron silicon

Haarahiltunen, Antti; Vähänissi, Ville; Yli-Koski, Marko; Savin, Hele

2012

Passivation of Black Silicon Surfaces with ALD Deposited Al2O3

Repo, Päivikki; Haarahiltunen, Antti; Saininiemi, Lauri; Ylikoski, Marko; Talvitie, Heli; Schubert, Martin C.; Savin, Hele

2012

ISSN: 2156-3381

Non-Equilibrium Segregation of Iron and Iron Precipitation at the Emitter During Phosphorus Diffusion

Savin, Hele

2012

ISSN: 1876-6102

Diffusion gettering of metal impurities in silicon

Savin, Hele

2012

ISBN: 978-1-4673-0064-3

Modeling the size-distribution of iron silicide precipitates in multicrystalline silicon

Schön, Jonas; Haarahiltunen, Antti; Savin, Hele; Fenning, David P.; Buonassisi, Tonio; Warta, Wilhelm; Schubert, Martin C.

2012

ISBN: 978-1-4673-0064-3

Improving the red zone in n-type silicon solar cells

Vähänissi, Ville; Yli-Koski, Marko; Boulfrad, Yacine; Savin, Hele

2012

Enhancement of the performance of as-grown mc-Si wafers from the deteriorated area of ingots by internal gettering

Boulfard, Yacine; Arnberg, Lars; Haarahiltunen, Antti; Savin, Hele

2011

Effect of Thermal History on Iron Precipitation and Gettering in Crystalline Silicon

Haarahiltunen, Antti; Yli-Koski, Marko; Savin, Hele

2011

Effect of Thermal History on Iron Precipitation in Crystalline Silicon

Haarahiltunen, Antti; Yli-Koski, Marko; Savin, Hele

2011

ISSN: 1876-6102

Experimentally Defined Electronic Properties of InGaAsN: Input for Solar Cell Simulations

Repo, Päivikki; Lebedeva, Natalia; Savin, Hele

2011

Micro-luminesence spectroscopy on multicrystalline silicon

Gundel, P.; Schubert, M.; Kwapil, W.; Schön, J.; Warta, W.; Martinez-Criado, G.; Sans, J.A.; Reiche, M.; Savin, H.; Yli-Koski, M.

2009

Copper induced lifetime degradation is silicon solar cell material

Savin, Hele; Yli-Koski, Marko; Haarahiltunen, Antti; Talvitie, Heli; Asghar, M. I.; Sinkkonen, Juha

2008

Non-refereed scientific articles

Unrefereed conference proceedings

Investigation of Al2O3 Passivation Layers by Photoluminescence Imaging under Applied Voltage

Haug, Halvard; Yameng, Bao; Savin, Hele; Marstein, Erik S.

2016 in EU PVSEC Proceedings (EU PVSEC)

ISBN: 3-936338-41-8

ISSN: 2196-100X

Reduction of light-induced degradation of p-type solar-grade Czochralski silicon by corona charging

Boulfrad, Yacine; Lindroos, Jeanette; Inglese, Alessandro; Yli-Koski, Marko; Savin, Hele

2013

Effect of ALD Reactants on Blistering of Aluminum Oxide Films on Crystalline Silicon

Li, Shuo; Repo, Päivikki; von Gastrow, Guillaume; Bao, Yameng; Savin, Hele

2013

Sensitivity of Al2O3 Passivation on the Surface Condition Prior to the ALD Process

Li, Shuo; Repo, Päivikki; von Gastrow, Guillaume; Bao, Yameng; Savin, Hele

2013

Fast-diffusing interstitial copper, iron and nickel in silicon

Lindroos, Jeanette; Fenning, David P.; Backlund, Daniel J.; Boulfrad, Yacine; Buonassisi, Tonio; Estreicher, Stefan K.; Savin, Hele

2013

Improved silicon surface passivation with atomic layer deposited Al2O3 for photovoltaic applications

von Gastrow, Guillaume; Li, Shuo; Bao, Yameng; Repo, Päivikki; Savin, Hele

2013

Gettering of iron by ion implanted emitters

Vähänissi, Ville; Haarahiltunen, Antti; Yli-Koski, Marko; Savin, Hele

2013

Gettering of iron in silicon solar cells with implanted emitters

Vähänissi, Ville; Haarahiltunen, Antti; Yli-Koski, Marko; Savin, Hele

2013

Experimental Study of Phosphorus Diffusion Gettering in n-type Multicrystalline Silicon

Lindroos, Jeanette; Talvitie, Heli; Savin, Hele

2011

Light-induced degradation of Cu-contaminated Ga-doped Cz-Si

Lindroos, Jeanette; Haarahiltunen, Antti; Savin, Hele

2011

Characterization and simulation of GaInNAs solar cells grown by molecular beam epitaxy

Repo, Päivikki; Lebedeva, Natalia; Savin, Hele

2011

Effect of iron on solar cell parameters

Vähänissi, Ville; Yli-Koski, Marko; Savin, Hele

2011

Segregation coefficient for iron in SOI wafers with polysilicon

Yli-Koski, Marko; Savin, Hele

2011

Iron gettering with aluminium and back-surface passivation of single crystalline silicon

Lindroos, Jeanette; Yli-Koski, Marko; Haarahiltunen, Antti; Savin, Hele

2010

Copper related light induced degradation in silicon

Savin, Hele; Yli-Koski, Marko; Haarahiltunen, Antti

2010

Publications intended for professional communities

Article in professional conference proceedings

Low-Cost Photovoltaic Materials

Hashmi, Ghufran; Lund, Peter; Korppi-Tommola, Jouko; Antila, Liisa; Lemmetyinen, Helge; Kaunisto, Kimmo; Munter, Tony; Vuorinen, Tommi; Nyman, Mathias; Aarnio, Harri; Österbacka, Ronald; Repo, Päivikki; von Gastrow, Guillaume; Savin, Hele

2013

Gettering of Fe by implanted emitters

Savin, Hele; Vähänissi, Ville; Haarahiltunen, Antti

2013

Using nanotechnology to manufacture solar revolution

Savin, Hele

2013

Riddle of light induced degradation in silicon solar cells

Savin, Hele

2013

Published development or research report

Overview of early publications on Atomic Layer Deposition

Aarik, Jaan; Akbashev, Andrew R.; Cameron, David; Elam, Jeffrey; Elliott, Simon; Gottardi, Gloria; Grigoras, Kestutis; Koshtyal, Yury; Kääriäinen, Marja-Leena; Kääriäinen, Tommi; Malkov, Anatoly; Malygin, Anatoly; Molarius, Jyrki; Nikkola, Juha; Pedersen, Henrik; Puurunen, Riikka L.; Ras, Robin H. A.; Roozeboom, Fred; Savin, Hele; Seidel, Thomas E.; Sundqvist, Jonas; van Ommen, J.Ruud; Ylivaara, Oili M. E.

2014

Front side antireflection concepts for silicon solar cells with diffractive rear side structures

Bett, A.J.; Eisenlohr, J.; Höhn, O.; Bläsi, B.; Benick, J.; Repo, Päivikki; Savin, Hele; Goldschmidt, J.C.; Hermle, M.

2014

Modeling the size distribution of iron precipitates in photosphorus-implanted emitters

Laine, Hannu; Vähänissi, Ville; Hofstetter, Jasmin; Morishige, Ashley; Haarahiltunen, Antti; Fenning, David; Savin, Hele

2014

A novel atomic layer deposited Al2O3 process for c-Si surface passivation and moisture barrier

Li, Shuo; Bao, Yameng; von Gastrow, Guillaume; Laitinen, Mikko; Sajavaara, Timo; Savin, Hele

2014

Temperature dependence of light-induced degradation in copper-contaminated silicon

Lindroos, Jeanette; Savin, Hele

2014

Analysis of Different Models of Iron Precipitation in Multicrystalline Silicon

Morishige, Ashley; Laine, Hannu; Schön, Jonas; Hofstetter, Jasmin; Haarahiltunen, Antti; Schubert, Martin; Savin, Hele; Buonassisi, Tonio

2014

Interdigitated black silicon solar cells

Repo, Päivikki; Savin, Hele

2014

Analysis of phosphorus diffusion and intrinsic gettering of iron in multicrystalline silicon

Haarahiltunen, Antti; Talvitie, Heli; Yli-Koski, Marko; Vähänissi, Ville; Savin, Hele

2009

Effect of iron on the efficiency of single crystalline silicon solar cells

Vähänissi, Ville; Haarahiltunen, Antti; Talvitie, Heli; Yli-Koski, Marko; Savin, Hele

2009

Heterogeneous iron precipitation and gettering in multicrystalline silicon

Haarahiltunen, Antti; Savin, Hele; Yli-Koski, Marko; Asghar, M. I.; Sinkkonen, Juha

2008

Publications intended for the general public

Popular article, newspaper article

The Solar Revolution

Savin, Hele

2012 in Aalto University Magazine (EU PVSEC)

ISSN: 1799-9324

Patents and invention disclosures

Patent

Mittausmenetelmä, järjestely ja ohjelmistotuote

Savin, Hele; Haarahiltunen, Antti; Yli-Koski, Marko

2010

Comparison of contact and contactless CV for thin film oxide characterization

Pasanen, Toni; Heinonen, Juha; Kumar, Navneet; Vähänissi, Ville; Modanese, Chiara; Savin, Hele

2017